Items where Author is "Tang, Xinlan"

Article

Yu, Fei and Xu, Min and Wang, Junhua and Zhang, Xiangchao and Tang, Xinlan (2024) Balancing the Efficiency and Sensitivity of Defect Inspection of Non-Patterned Wafers with TDI-Based Dark-Field Scattering Microscopy. Sensors, 24 (5). p. 1622. ISSN 1424-8220